The automatic nanoimprint system is a fully automatic nanoimprint device that can be integrated including taking, cleaning, homogenizing, hot plate, cooling, nanoimprint and UV curing.

The automatic nanoimprint system is suitable for substrates up to 300mm in diameter.

High reduction imprinting of micro and nano structures with linewidth of less than 50nm can be achieved.

The fully automatic and closed production system guarantees a high qualified rate of products.

It is suitable for mass production of AR/VR, 3D sensors, biochips and other nanoimprint applications.

Can be customized according to product requirements.